Practical Issues for Quantitative X-ray Microanalysis in SEM at Low kV
نویسندگان
چکیده
منابع مشابه
Fundamental Constants for Quantitative X-ray Microanalysis.
Quantitative X-ray microanalysis requires the use of many fundamental constants related to the interaction of the electron beam with the sample. The current state of our knowledge of such constants in the particular areas of electron stopping power, X-ray ionization cross-sections, X-ray fluorescence yield, and the electron backscattering yield, is examined. It is found that, in every case, the...
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At 20kV, quantitative analysis with relative errors below 5% can be delivered by EDS standardless analysis provided SDD detector efficiency is accurately determined and standards have been pre-measured on a well-characterised detector [1]. The increasing need to analyse features well below 1 μm in size has encouraged use of lower beam voltages. At 5 kV, there is at least one accessible line emi...
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Specimen preparation using abrasives results in surface and subsurface mechanical (stresses, strains), geometrical (roughness), chemical (contaminants, reaction products) and physical modifications (structure, texture, lattice defects). The mechanisms involved in polishing with abrasives are presented to illustrate the effects of surface topography, surface and subsurface composition and induce...
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Low voltage x-ray microanalysis, defined as being performed with an incident beam energy ≤5 keV, can achieve spatial resolution, laterally and in depth, of 100 nm or less, depending on the exact selection of beam energy and the composition of the target. The shallow depth of beam penetration, with the consequent short path length for x-ray absorption, and the low overvoltage, the ratio of beam ...
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ژورنال
عنوان ژورنال: Microscopy Today
سال: 2006
ISSN: 1551-9295,2150-3583
DOI: 10.1017/s1551929500055164